Funder
National Science Foundation
Center for Dielectrics and Piezoelectrics, North Carolina State University
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference55 articles.
1. Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications;Pulskamp;MRS Bull.,2012
2. Piezoelectric thin films for sensors, actuators, and energy harvesting;Muralt;MRS Bull.,2009
3. Y. Miyazawa, H. Omae, T. Ishii, H. Koto, and F. Akahane, Seiko Epson Corp, United States Patent, US5113204A.
4. {100}- textured piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: integration, deposition and properties;Ledermann;Sens. Actuat. Phys.,2003
5. Thin film piezoelectrics for MEMS;Trolier-McKinstry;J. Electroceramics,2004
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