ZnO bilayer thin film transistors using H2O and O3 as oxidants by atomic layer deposition
Author:
Funder
MOST
NSFC
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference34 articles.
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5. Performance improvement of atomic layer-deposited ZnO/Al2O3 thin-film transistors by low-temperature annealing in air;Wang;IEEE Trans. Electron Devices,2016
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