Microstructure and piezoelectric response of Y Al1−N thin films-Reference-Cited by-同舟云学术

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Microstructure and piezoelectric response of Y Al1−N thin films

Published:2015-11 Issue: Volume:100 Page:81-89
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

Mayrhofer P.M.,Riedl H.,Euchner H.,Stöger-Pollach M.,Mayrhofer P.H.,Bittner A.,Schmid U.

Funder

Austrian Science Fund

Publisher

Elsevier BV

Subject

Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Piezoelectric aluminum nitride thin films for microelectromechanical systems;Piazza;MRS Bull.,2012

2. Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes;Kucera;Appl. Phys. Lett.,2014

3. Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode;Kucera;Sensor Actuators B,2014

4. F. Gerfers, M. Kohlstadt, H. Bar, M.-Y. He, Sub-μg ultra-low-noise MEMS accelerometers based on CMOS-compatible piezoelectric AlN thin films TRANSDUCERS 2007 Lyon, 2007. pp. 1191–1194.

5. Super-high-frequency SAW transducer utilizing AlN/ultrananocrystalline diamond architectures;Dow;IEEE T. Ultrason. Ferr.,2013

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1. Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y0.2Al0.8N) thin films for BAW resonators with high electromechanical coupling;Sensors and Actuators A: Physical;2024-10

2. Enhancing Ultrasonic Echo Response of AlN Thin Film Transducer Deposited by RF Magnetron Sputtering;Sensors;2024-09-07

3. A review of oriented wurtzite-structure aluminum nitride films;Journal of Alloys and Compounds;2024-06

4. Two-dimensional electron gases in AlYN/GaN heterostructures grown by metal–organic chemical vapor deposition;APL Materials;2024-05-01

5. Recent progress in piezoelectric thin films as self-powered devices: material and application;Frontiers in Materials;2024-04-25

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