Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes-Reference-Cited by-同舟云学术

Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes

Published:2014-06-09 Issue:23 Volume:104 Page:233501
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Kucera Martin¹²,Wistrela Elisabeth¹,Pfusterschmied Georg¹,Ruiz-Díez Víctor³,Manzaneque Tomás³,Luis Sánchez-Rojas José³,Schalko Johannes¹,Bittner Achim¹,Schmid Ulrich¹

Affiliation:

1. Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7, 1040 Vienna, Austria

2. Austrian Centre of Competence for Tribology, AC2T research GmbH, Viktor-Kaplan-Straße 2, 2700 Wr. Neustadt, Austria

3. Group of Microsystems, Actuators and Sensors, E.T.S.I. Industriales, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain

Funder

FPU

FPI

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4882177

Reference30 articles.

1. Biosensing using dynamic-mode cantilever sensors: A review

2. Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

3. Viscosity and density values from excitation level response of piezoelectric-excited cantilever sensors

4. Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications

5. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope

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