Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle-Reference-Cited by-同舟云学术

Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle

Published:2019-11 Issue: Volume:324 Page:134890
ISSN:0013-4686
Container-title:Electrochimica Acta
language:en
Short-container-title:Electrochimica Acta

Author:

Haye Emile,Achour Amine,Guerra Abdelouadoud,Moulaï Fatsah,Hadjersi Toufik,Boukherroub Rabah,Panepinto Adriano,Brousse Thierry,Pireaux Jean-Jacques,Lucas Stephane

Publisher

Elsevier BV

Subject

Electrochemistry,General Chemical Engineering

Reference44 articles.

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2. Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride;Haye;Surf. Coat. Technol.,2018

3. Influence of substrate bias voltage on the properties of TiO 2 deposited by radio-frequency magnetron sputtering on 304L for biomaterials applications;Bait;Appl. Surf. Sci.,2017

4. Hydrogen doped BaTiO 3 films as solid-state electrolyte for micro-supercapacitor applications;Ben Cheikh;J. Alloys Compd.,2017

5. All-Solid-state lithium-ion microbatteries: a review of various three-dimensional concepts;Oudenhoven;Adv. Energy Mater.,2011

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