Tetranuclear yttrium and gadolinium 2-acetylcyclopentanoate clusters: Synthesis and their use as spin-coating precursors for metal oxide film formation for field-effect transistor fabrication-Reference-Cited by-同舟云学术

Tetranuclear yttrium and gadolinium 2-acetylcyclopentanoate clusters: Synthesis and their use as spin-coating precursors for metal oxide film formation for field-effect transistor fabrication

Published:2018-10 Issue:10 Volume:36 Page:1098-1105
ISSN:1002-0721
Container-title:Journal of Rare Earths
language:en
Short-container-title:Journal of Rare Earths

Author:

Pousaneh Elaheh,Preuβ Andrea,Assim Khaybar,Rüffer Tobias,Korb Marcus,Tittmann-Otto Jana,Hermann Sascha,Schulz Stefan E.,Lang Heinrich

Funder

German Research Foundation

Publisher

Elsevier BV

Subject

Geochemistry and Petrology,General Chemistry

Reference41 articles.

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3. Lanthanide oxide thin films by metalorganic chemical vapor deposition employing volatile guanidinate precursors;Milanov;Chem Mater,2009

4. Deposition of yttrium oxide thin films in supercritical carbon dioxide;Gougousi;Thin Solid Films,2008

5. Microwave ECR plasma CVD of cubic Y2O3 coatings and their characterization;Barve;Surf Coating Technol,2010

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