Equivalent strengths for reliability assessment of MEMS structures-Reference-Cited by-同舟云学术

Equivalent strengths for reliability assessment of MEMS structures

Published:2004-04 Issue:1 Volume:112 Page:163-174
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chen Kuo-Shen,Ou Kuang-Shun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference32 articles.

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3. S. Brown, et al. (Eds.), Microelectromechanical Structures for Materials Research, in: Proceedings of the Material Research Society Symposium, vol. 518, 1998.

4. Fracture testing of bulk silicon microcantilever beams subjected to a side load;Wilson;J. Microelectromech. Syst.,1996

5. Trailing and testing the fracture strength of silicon at the mesoscale;Chen;J. Am. Ceram. Soc.,2000

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