Author:
Chen Kuo-Shen,Ou Kuang-Shun
Reference132 articles.
1. Science-based MEMS reliability methodology;Tanner;Microelectron. Reliab.,2007
2. Reliability of MEMS: a perspective on failure mechanisms, improvement solutions and best practices at development level;Iannacci;Displays,2015
3. Ch. 9: Techniques in residual stress measurement for MEMS and their applications;Chen,2006
4. Micromechanics and MEMS: Classic and Seminal Papers to 1990,1997
5. Fundamentals of Microfabrication;Madou,1997
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