Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level-Reference-Cited by-同舟云学术

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Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level

Published:2015-04 Issue: Volume:37 Page:62-71
ISSN:0141-9382
Container-title:Displays
language:en
Short-container-title:Displays

Author:

Iannacci Jacopo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Human-Computer Interaction

Reference88 articles.

1. Silicon as a mechanical material;Petersen;Proc. IEEE,1982

2. Practical Guide to RF-MEMS;Iannacci,2013

3. Advanced RF MEMS,2010

4. Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes;Iannacci;Springer Microsyst. Technol.,2014

5. Energy Harvesting Technologies,2009

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2. Research on Structural Failure of MEMS Safety and Arming Device Considering Uncertainty in Fabrication Errors;IEEE Sensors Journal;2023-07-15

3. Fatigue of Micro-Electro-Mechanical Systems (Mems) Thin Films;Comprehensive Structural Integrity;2023

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