Micromachined resonant multiple gas sensor-Reference-Cited by-同舟云学术

Micromachined resonant multiple gas sensor

Published:2005-07 Issue:1 Volume:122 Page:31-38
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zribi Anis,Knobloch Aaron,Tian Wei-Cheng,Goodwin Stacey

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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5. MEMS infared gas spectrometer based on a porous silicon tunable filter;Lammel,2001

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