On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate
Author:
Funder
King Fahd University of Petroleum and Minerals
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
https://link.springer.com/content/pdf/10.1007/s00707-021-02984-9.pdf
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1. Nonlinearity reduction in MEMS resonators based on design of H-shaped beams;Acta Mechanica;2022-10-04
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