Author:
Gradolph C.,Friedberger A.,Müller G.,Wilde J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Micromachined pressure sensors: review and recent developments;Eaton;Smart Materials and Structures,1997
2. Packaging of micromachined absolute pressure sensors for high-accuracy measurements;Reynolds;Advances in Electronic Packaging,1999
3. Packaging of physical sensors for aggressive media applications;Dyrbye;Journal of Micromechanics and Microengineering,1996
4. Progress in media compatible pressure sensors;Petrovic,2001
5. A vertically integrated media-isolated absolute pressure sensor;Goldman;Sensors and Actuators A: Physical,1998
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献