A vertically integrated media-isolated absolute pressure sensor-Reference-Cited by-同舟云学术

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A vertically integrated media-isolated absolute pressure sensor

Published:1998-04 Issue:1-3 Volume:66 Page:155-159
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Goldman K.,Gritt G.,Baskett I.,Czarnocki W.,Ramirez A.,Brown C.,Hughes D.,Wallace D.,Shah M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Sensor development in the microcomputer age;Wolber;IEEE Trans. Electron. Devices,1979

2. Lowcost, high-volume packaging techniques for silicon sensors and actuators;Mallon,1988

3. Thin film polymer stress measurement using piezoresistive anisotropically etched pressure sensors;Bitko,1996

4. Batch fabrication of media isolated absolute pressure sensors;Sooriakumar,1995

5. Vertically integrated sensor structure and method;Sooriakumar,1997

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Impact of high-g and high vibration environments on piezoresistive pressure sensor performance;Sensors and Actuators A: Physical;2009-03

2. A Monte-Carlo simulation of the effect of surface morphology on the fracture of nanobeams;International Journal of Fracture;2007-11

3. Media protected surface micromachined leverage beam pressure sensor;Journal of Micromechanics and Microengineering;2001-09-07

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