Impact resistance and static strength analysis of an extremely simplified micro hotplate with novel suspended film-Reference-Cited by-同舟云学术

Impact resistance and static strength analysis of an extremely simplified micro hotplate with novel suspended film

Published:2018-09 Issue: Volume:280 Page:495-504
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Liu Qi,Wang Yipin,Yao Jinyuan,Ding Guifu

Funder

Shanghai Science and Technology Commission

Shanghai Professional Technical Service Platform for Non-Silicon Micro-Nano Integrated Manufacturing

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Analytical modeling of square microhotplate for gas sensing application;Saxena;IEEE Sens. J.,2013

2. Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates;Samà;Sens. Actuators B Chem.,2016

3. Low power CO2 NDIR sensing using a micro-bolometer detector and a micro-hotplate IR-source;Barritault;Sens. Actuators B Chem.,2013

4. Comparison of gas sensor performance of SnO2 nano-structures on microhotplate platforms;Andio;Sens. Actuators B Chem.,2012

5. Fabrication of a MEMS micro-hotplate;Yi;J. Phys. Conf. Ser.,2011

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