Author:
Wang Pengfei,Wei Guangfen,Li Meihua,Liu Yanli,Lin Zhonghai,Nai Changxin
Funder
Natural Science Foundation of China
Shandong Province
Yantai Science and Technology Innovation Development Project
Reference19 articles.
1. A Novel Low Power Hexagonal Gas Sensor Cell for Multi-Channel Gas Detection
2. TEM analysis of microheater using SiO2/Si3N4 composite membrane for long term gas sensing applications;chowdhury;2017 1st International Conference on Electronics Materials Engineering and Nano-Technology (IEMENTech) IEMENTech,2017
3. The micro hydrogen sensor chip with low power consumption
4. A molybdenum MEMS microhotplate for high-temperature operation
5. Thermal stresses on membrane based microdevices
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献