Implementation of phase-locked loop control for MEMS scanning mirror using DSP-Reference-Cited by-同舟云学术

Implementation of phase-locked loop control for MEMS scanning mirror using DSP

Published:2007-01 Issue:1 Volume:133 Page:243-249
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wang Chuanwei,Yu Hung-Hsiu,Wu Mingching,Fang Weileun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. M. Wu, “The Development of Optical MEMS Fabrication—the Case of Micro Scanning Mirror Driven by Electrostatic Comb-driven Actuator.” Ph.D. thesis, Power Mechanical Engineering, National Tsing Hua University, 2005.

2. A reinforced micro-torsional-mirror driven by electrostatic torque generators;Lin;Sens. Actuators A,2003

3. Adaptive Tuning for Vibration Gyroscopes;Leland,2001

4. Stability and resolution analysis of a phase-locked loop nature frequency tracking system for MEMS fatigue testing;Sun;J. Dynamic Syst., Measure. Ctrl.,2002

5. Phase-locked control of the Coriolis meter's resonance frequency based on virtual instrumentation;Kutin;Sens. Actuators A,2003

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