Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Silicon torsional scanning mirror;Peterson;IBM J. Res. Dev.,1980
2. L.J. Hornbeck, Current Status of The Digital Micromirror Device (DMD) for Projection Television Applications, Int. Electron Devices Tech. Dig., Dallas, TX, December 1993, pp. 381–384.
3. M.-H. Kiang, O. Solgaard, R.S. Muller, K.Y. Lau, Surface-Micromachined Electrostatic-Comb Driven Scanning Micromirrors for Barcode Scanners, IEEE MEMS Workshop, San Diego, CA, February 1996, pp. 192–197.
4. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning;Kiang;J. Microelectromech. Sys.,1998
5. Optical raster-scanning displays based on surface-micromachined polysilicon mirrors;Hagelin;IEEE Sel. Topics Quantum Electr.,1999
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