Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones-Reference-Cited by-同舟云学术

Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones

Published:2008-07 Issue: Volume:145-146 Page:263-270
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bedyk W.,Niessner M.,Schrag G.,Wachutka G.,Margesin B.,Faes A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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4. On the acoustical resistance due to viscous losses in the air gap of electrostatic transducers;Skvor;Acustica,1967

5. Microsystem Design;Senturia,2002

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