A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones-Reference-Cited by-同舟云学术

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A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones

Published:2021-06 Issue:3 Volume:30 Page:360-368
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Anzinger Sebastian^ORCID,Bretthauer Christian,Tumpold David,Dehe Alfons

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9444912/09380679.pdf?arnumber=9380679

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tasarım optimizasyonu ile geliştirilmiş MEMS mikrofon frekans yanıtı;Journal of Smart Systems Research;2023-12-24

2. Dual-Backplate CMUTs With Wide Bandwidth and Low Driving Voltage for Airborne Applications;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

3. Non-Linear Behavioral Modeling of Capacitive MEMS Microphones;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. A Behavioral Nonlinear Modeling Implementation for Mems Capacitive Microphones;2023

5. Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone;Journal of Microelectromechanical Systems;2022-08

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