Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator-Reference-Cited by-同舟云学术

Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator

Published:2010-08 Issue:2 Volume:162 Page:225-234
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mestrom R.M.C.,Fey R.H.B.,Phan K.L.,Nijmeijer H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference34 articles.

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2. Nonlinear limits for single-crystal silicon microresonators;Kaajakari;Journal of Microelectromechanical Systems,2004

3. Modelling the dynamics of a MEMS resonator: simulations and experiments;Mestrom;Sensors and Actuators A,2008

4. Study of the nonlinearities in micromechanical clamped–clamped beam resonators using stroboscopis SEM;Shao;Journal of Micromechanics and Microengineering,2008

5. A reduced-order model for electrically actuated microbeam-based MEMS;Younis;Journal of Microelectromechanical Systems,2003

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