Parametrically excited microcantilever beam under large deflection and mass sensing
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics
Link
https://link.springer.com/content/pdf/10.1007/s11012-023-01656-3.pdf
Reference57 articles.
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3. Wang X, Li B, Russo OL, Roman HT, Chin KK, Farmer KR (2006) Diaphragm design guidelines and an optical pressure sensor based on MEMS technique. Microelectron J 37(1):50–56. https://doi.org/10.1016/j.mejo.2005.06.015
4. Jiménez S, Cole MOT, Keogh PS (2016) Vibration sensing in smart machine rotors using internal MEMS accelerometers. J Sound Vib 377:58–75. https://doi.org/10.1016/j.jsv.2016.05.014
5. Ziegler C (2004) Cantilever-based biosensors. Anal Bioanal Chem 379(7–8):946–959
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