Nonlinearity reduction in MEMS resonators based on design of H-shaped beams
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
https://link.springer.com/content/pdf/10.1007/s00707-022-03340-1.pdf
Reference30 articles.
1. Ma, C., Chen, S., Guo, F.: Simultaneous determination of the mass and position of attached particles using a micro-beam resonant mass sensor with axial pre-tension. Acta Mech. 232(10), 4037–4055 (2021)
2. Khater, M.E.: On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate. Acta Mech. 232, 3033–3040 (2021)
3. Zou, X., Seshia, A.A.: The impact of damping on the frequency stability of nonlinear MEMS oscillators. J. Microelectromech. Syst. 24(3), 537–544 (2015)
4. Nguyen, C.T.-C.: MEMS technology for timing and frequency control. IEEE Trans. Ultrason., Ferroelectr., Freq. Control 54(2), 251–270 (2007)
5. Liu, R., Nilchi, J. N., Li, W.-C., Nguyen, C. T.-C.: Soft-impacting micromechanical resoswitch zero-quiescent power AM receiver. In: Proc. IEEE 29th Int. Conf. Micro Electro Mech. Syst., pp. 51–54 (2016)
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