Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication-Reference-Cited by-同舟云学术

Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication

Published:2014-08 Issue: Volume:215 Page:161-166
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Suzuki Tatsuya,Hara Motoaki,Oguchi Hiroyuki,Kuwano Hiroki

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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4. Development of three dimensional pattern-generating system for focused-ion-beam chemical vapor deposition;Hashino;J. Vac. Sci. Technol. B,2003

5. Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition;Morita;J. Vac. Sci. Technol. B,2003

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2. A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

3. Microfabricated emitter array for an ionic liquid electrospray thruster;Japanese Journal of Applied Physics;2017-05-30

4. Micromachined multiple focused-ion-beam devices;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-03