Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication

Author:

Suzuki Tatsuya,Hara Motoaki,Oguchi Hiroyuki,Kuwano Hiroki

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

2. A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

3. Microfabricated emitter array for an ionic liquid electrospray thruster;Japanese Journal of Applied Physics;2017-05-30

4. Micromachined multiple focused-ion-beam devices;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-03

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