Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition-Reference-Cited by-同舟云学术

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Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition

Published:2003 Issue:6 Volume:21 Page:2737
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Morita Takahiko,Kometani Reo,Watanabe Keiichiro,Kanda Kazuhiro,Haruyama Yuichi,Hoshino Takayuki,Kondo Kazushige,Kaito Takashi,Ichihashi Toshinari,Fujita Jun-ichi,Ishida Masahiko,Ochiai Yukinori,Tajima Tsutomu,Matsui Shinji

Publisher

American Vacuum Society

Subject

General Engineering

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