1. Micromachined multiple focused-ion-beam devices;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-03
2. Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication;Sensors and Actuators A: Physical;2014-08
3. Fine pattern definition with atomic intermixing induced by focused ion beam and its application to x-ray mask fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-03
4. Ion Beam Techniques for Micro Electro Mechanical Systems;Micro System Technologies 90;1990
5. The mechanisms of ion beam modification of PMMA for dry etch development ion beam lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01