A corrugated bridge of low residual stress for RF-MEMS switch-Reference-Cited by-同舟云学术

A corrugated bridge of low residual stress for RF-MEMS switch

Published:2007-04 Issue:2 Volume:135 Page:818-826
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Song Yo-Tak,Lee Hai-Young,Esashi Masayoshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. RF MEMS from a device perspective;Yao;J. Micromech. Microeng.,2000

2. Performance of low-loss RF MEMS capacitive switches;Goldsmith;IEEE Microwave Guided Wave Lett.,1998

3. Characteristics of micromachined switches at microwave frequencies;Goldsmith,1996

4. A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4GHz;Yao,1995

5. RF MEMS switches and switch circuits;Rebeiz;IEEE Microwave Mag.,2001

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