Fabrication and characterization of folded SU-8 suspensions for MEMS applications-Reference-Cited by-同舟云学术

Fabrication and characterization of folded SU-8 suspensions for MEMS applications

Published:2006-08 Issue: Volume:130-131 Page:379-386
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bachmann Daniel,Schöberle Bernd,Kühne Stéphane,Leiner Yves,Hierold Christofer

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Adhesion and stiction: mechanisms, measurement techniques, and methods for reduction;Bhushan;J. Vacuum Sci. Technol. B,2003

2. MEMS optical scanners for microscopes;Miyajima;IEEE J. Selected Top. Quantum Electron.,2004

3. Polydimethylsiloxane, a photocurable rubberelastic polymer used as spring material in micromechanical sensors;Lotters;Microsyst. Technol.,1997

4. 2-DOF MEMS mirror for large deflection using SU-8 torsion beam;Fujita;Proc. APCOT MNT 2004,2004

5. SU-8: a low-cost negative resist for MEMS;Lorenz;J. Micromech. Microeng.,1997

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