Author:
Miyajima H.,Murakami K.,Katashiro M.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Cited by
44 articles.
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4. Temperature dependence of the scanning performance of an electrostatic microscanner;Journal of Micromechanics and Microengineering;2016-01-20
5. Micro-Mirrors;Reference Module in Materials Science and Materials Engineering;2016