Analysis of lateral instability of in-plane comb drive MEMS actuators based on a two-dimensional model-Reference-Cited by-同舟云学术

Analysis of lateral instability of in-plane comb drive MEMS actuators based on a two-dimensional model

Published:2004-06 Issue:1 Volume:113 Page:78-85
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang Wei,Lu Ganyu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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2. Design, fabrication, and operation of submicron gap comb-drive microactuators;Hirano;J. MEMS,1992

3. A triangular electrostatic comb array for micromechanical resonant frequency tuning;Lee;Sens. Actuators A,1998

4. H.Y. Lin, W. Fang, Out-of-plane comb-drive lever actuator, in: Proceedings of the ASME IMECE, Orlando, FL, USA, 2000, pp. 97–102.

5. Optimal shape design of an electrostatic comb drive in microelectromechanical systems;Ye;J. MEMS,1998

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