Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Laterally driven polysilicon resonant microstructures;Tang;Sensors and Actuators A,1989
2. A pure CMOS surface micromachined integrated accelerometer;Hierold,1996
3. A surface-micromachined tunable microgyroscope;Lee,1996
4. Surface-micromach-inedresonant force sensor;Roessig,1995
5. A surface micromachined capacitive absolute pressure sensor array on a glass substrate;Habibi;Sensors and Actuators A,1995
Cited by
42 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献