Author:
Alper Said Emre,Silay Kanber Mithat,Akin Tayfun
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. A HARPSS polysilicon vibrating ring gyroscope;Ayazi;J. Microelectromech. Syst.,2001
2. A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate;Alper,2003
3. Lateral gyroscope suspended by two gimbals through high aspect ratio ICP etching;Park,1999
4. A single-crystal silicon vibrating ring gyroscope;He,2002
5. Decoupled microgyros and the design principle DAVED;Geiger;Sens. Actuators A,2002
Cited by
34 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献