Fabrication of A Nickel MEMS Accelerometer Based On SU-8 LIGA Process
Author:
Affiliation:
1. Rajalakshmi Engineering College,Centre for Excellence in MEMS and Microfluidics,Chennai,India
2. Rajalakshmi Institute of Technology,Chennai,India
Funder
Ministry of Science and Technology
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9865098/9865099/09865704.pdf?arnumber=9865704
Reference12 articles.
1. Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology
2. A low-cost rate-grade nickel microgyroscope
3. Fundamentals of nano/microfabrication and scale effect
4. Formation of thick SU-8 mold for the fabrication of UV-LIGA based nickel micro-gyroscope structures;jain;Informacije MIDEM-Ljubljana,2014
5. Nickel electroplating for high-resolution nanostructures
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