Micromachined thick film piezoelectric ultrasonic transducer array-Reference-Cited by-同舟云学术

Micromachined thick film piezoelectric ultrasonic transducer array

Published:2006-08 Issue: Volume:130-131 Page:485-490
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wang Zhihong,Zhu Weiguang,Miao Jianmin,Zhu Hong,Chao Chen,Tan Ooi Kiang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

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2. Ferroelectric and antiferroelectric films for microelectromechanical systems applications;Xu;Thin Solid Films,2000

3. Development of piezoelectric micromachined ultrasonic transducers;Akasheh;Sens. Actuators A,2004

4. Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging?;Oralkan;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2002

5. Micromachined ultrasonic transducers with improved coupling factors from a CMOS compatible process;Eccardt;Ultrasonics,2000

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