1. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions;Muralt;Sensors Actuators,1996
2. Electrostatically excited diaphragm driven as a loudspeaker;Rangsten,1995
3. IMEMS-integrated micro electro mechanical systems by VLSI standard and micromachining;Baltes,1994
4. A surface micromachined electrostatic ultrasonic air transducer;Haller,1994
5. Full integration of a pressure sensor system into a standard BiCMOS-process;Scheiter,1997