Development of piezoelectric micromachined ultrasonic transducers

Author:

Akasheh Firas,Myers Todd,Fraser John D.,Bose Susmita,Bandyopadhyay Amit

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Ferroelectric-based microactuators;Robbins;Integr. Ferroelect.,1995

2. A. Goldstein, R.L. Powis, Medical ultrasonic diagnostics, in: R.N Thurston, A.D. Pierce (Eds.), Ultrasonic Instruments and Devices I, in: E. Papadakis (volume ed.), Physical Acoustics, vol. XXIII, Academic Press, New York, 1999, pp. 43–191.

3. Surface micromachined capacitive ultrasonic transducers;Ladabaum;IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.,1998

4. R.L. Goldberg, S.S. Smith, J. Mottley, K.W. Ferrara, Ultrasound, in: J.D. Bronzino (Editor-in-Chief), The Biomedical Engineering Handbook, vol. 1, second ed., CRC Press LLC, Boca Raton, 2000, pp. 65-1–65-23.

5. N.F. Foster, Piezolectric and piezoresistive properties of films, in: L.I. Maissel, R. Glang (Eds.), Handbook of Thin Film Technology, McGraw-Hill, New York, 1970 (Chapter 15).

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