Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator

Author:

Prasad Abhinav,Charmet Jérôme,Seshia Ashwin A.

Funder

Cambridge Trusts

W.D. Armstrong fund

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

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2. MEMS inertial sensors: a tutorial overview;Shaeffer;IEEE Commun. Mag.,2013

3. Gas sensors based on gravimetric detection—a review;Fanget;Sensors Actuators B Chem.,2011

4. A review of MEMS oscillators for frequency reference and timing applications;van Beek;J. Micromech. Microeng.,2012

5. Square-extensional mode single-crystal silicon micromechanical RF-resonator;Kaajakari;12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664),2003

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