MEMS capacitive flow sensor for natural gas pipelines-Reference-Cited by-同舟云学术

MEMS capacitive flow sensor for natural gas pipelines

Published:2015-07 Issue: Volume:231 Page:28-34
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nguyen Son D.,Paprotny Igor,Wright Paul K.,White Richard M.

Funder

California Energy Commission

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Flow sensors;Schabmueller,2004

2. MEMS-based gas flow sensors;Wang;Microfluid. Nanofluid.,2009

3. Micromachined flow sensors – a review;Nguyen;Flow Meas. Instrum.,1997

4. MEMS flow sensors for nano-fluidic applications;Wu,2000

5. Fabrication and characterization of a double-heater based {MEMS} thermal flow sensor;Sun;Sens. Actuators A: Phys.,2013

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