Fabrication and characterization of a double-heater based MEMS thermal flow sensor-Reference-Cited by-同舟云学术

Fabrication and characterization of a double-heater based MEMS thermal flow sensor

Published:2013-04 Issue: Volume:193 Page:25-29
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sun Jianhai,Cui Dafu,Zhang Lulu,Chen Xing,Cai Haoyuan,Li Hui

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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2. A double heater integrated gas flow sensor with thermal feedback;Bruschi;Sensors and Actuators A: Physical,2005

3. Miniaturized thermal flow sensors with planar-integrated sensor structures on semicircular surface channels;Dijkstra;Sensors and Actuators A: Physical,2008

4. Anemometer with hot platinum thin film;Mailly;Sensors and Actuators A: Physical,2001

5. A test structure for the design of thermal flow sensors;Sabate,2002

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