Highly sensitive MEMS frequency modulated accelerometer with small footprint-Reference-Cited by-同舟云学术

Highly sensitive MEMS frequency modulated accelerometer with small footprint

Published:2020-06 Issue: Volume:307 Page:112005
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Esteves Moreira Eurico,Kuhlmann Burkhard,Serra Alves Filipe,Alves Dias Rosana,Cabral Jorge,Gaspar João,Rocha Luis Alexandre

Funder

Fundação para a Ciência e a Tecnologia

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

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4. A novel single-axis MEMS tilt sensor with a high sensitivity in the measurement range from 0∘ to 360∘;Wang;Sensors,2018

5. Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS process;Merdassi;Sens. Actuators A Phys.,2015

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