Toward Sensitivity Enhancement of MEMS Accelerometers Using Mechanical Amplification Mechanism-Reference-Cited by-同舟云学术

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Toward Sensitivity Enhancement of MEMS Accelerometers Using Mechanical Amplification Mechanism

Published:2010-08 Issue:8 Volume:10 Page:1311-1319
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Ya'akobovitz Assaf,Krylov Slava

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/7361/5471693/05471792.pdf?arnumber=5471792

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Emerging Technologies in Displacement Amplification of Lever and Bridge-Type Compliant Mechanism: A Review Article;Journal of Physics: Conference Series;2023-09-01

2. Sensitivity Enhancement of Capacitive MEMS Accelerometer by Design of the Device Geometry;2023 IEEE Devices for Integrated Circuit (DevIC);2023-04-07

3. Design and Development of a Low-Power Wireless MEMS Lead-Free Piezoelectric Accelerometer System;IEEE Transactions on Instrumentation and Measurement;2023

4. Optimization of an amplification mechanism enabling large displacements in MEMS-based nanomaterial testing devices;Micro and Nano Engineering;2022-06

5. Effects of Natural Aging in Biaxial MEMS Accelerometers;IEEE Sensors Journal;2021-01-15

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