Nano-indentation method for the measurement of the Poisson’s ratio of MEMS thin films-Reference-Cited by-同舟云学术

Nano-indentation method for the measurement of the Poisson’s ratio of MEMS thin films

Published:2003-11 Issue:1-3 Volume:108 Page:20-27
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kim Jong-Hoon,Yeon Soon-Chang,Jeon Yun-Kwang,Kim Jeong-Gil,Kim Yong-Hyup

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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4. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation;Makino;Sens. Actuators,1999

5. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films;Tsuchiya;J. Microelectromech. Syst.,1998

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