Effects of scaling and geometry on the performance of piezoelectric microphones-Reference-Cited by-同舟云学术

Effects of scaling and geometry on the performance of piezoelectric microphones

Published:2012-10 Issue: Volume:185 Page:24-32
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Horowitz Stephen B.,Mathias Adam D.,Fox Jon R.,Cortes J.P.,Sanghadasa Mohan,Ashley Paul

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

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3. Micromachined piezoelectric membrane acoustic device;Ko;Sensors and Actuators A: Physical,2003

4. A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films;Polcawich;Sensors (Peterborough, NH),2004

5. A micromachined piezoelectric microphone for aeroacoustics applications;Horowitz,2006

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