Technical method of improving overload of pressure sensitive chip based on sacrificial layer technology

Author:

Chuai Rongyan,Yang YuxinORCID,Li Xin,Wang Jian,Zhang Bing

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Intelligent industrial measurement instruments with silicon piezoresistive MEMS pressure sensors, 14–16 September, Belgrade, Serbia;Frantlovic;In Proceedings of the 2016 4th International Symposium on Environmental Friendly Energies and Applications (EFEA),2016

2. AeroMEMS sensor array for high-resolution wall pressure measurements;Berns;Sens. Actuator A: Phys.,2006

3. Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range;Reynolds;Sens. Actuators A: Phys.,2000

4. Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor;Zhongliang;Rev. Sci. Instrum.,2013

5. Silicon pressure transmitters with overload protection;Andreev;Autom. Remote Control,2016

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors;2024 5th International Conference on Mechatronics Technology and Intelligent Manufacturing (ICMTIM);2024-04-26

2. Flexible low-temperature polycrystalline silicon thin-film transistors;Materials Today Advances;2020-03

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