Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors-Reference-Cited by-同舟云学术

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Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors

Published:2024-04-26 Issue: Volume: Page:214-218
ISSN:
Container-title:2024 5th International Conference on Mechatronics Technology and Intelligent Manufacturing (ICMTIM)
language:
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Author:

Xiong Fumin¹,Xi Yuxin²,Feng Zhangbin³

Affiliation:

1. Shenyang University of Chemical Technology,School of Information and Engineering,Shenyang,China

2. Guangzhou Institute of Science and Technology,School of Computer Science and Engineering,Guangzhou,China

3. Optics Technology Holding Co., Ltd,Department of Non Refrigeration R&D,Chuzhou,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10629219/10629224/10629422.pdf?arnumber=10629422

Reference13 articles.

1. The study on the high-temperature performances of a graphene MEMS pressure sensor

2. Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement

3. Hermetic and Bioresorbable Packaging Materials for MEMS Implantable Pressure Sensors: A Review

4. Optimal design of SiC piezoresistive pressure sensor considering material anisotropy

5. Material selection for optimum design of MEMS pressure sensors

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