Author:
Zhao Libo,Li Jie,Li Zhikang,Zhang Jiawang,Zhao Yihe,Wang Jiuhong,Xia Yong,Li Ping,Zhao Yulong,Jiang Zhuangde
Funder
National Natural Science Foundation of China
National Key Research & Development (R&D) plan
973 program
111 Program
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Micromachined ultrasonic transducers (MUTs);Ladabaum;Microelectron. Eng.,1996
2. cMUTs and electronics for 2D and 3D imaging: monolithic integration, in-handle chip sets and system implications;Daft;IEEE Ultrason. Symp.,2005
3. Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging;Caronti;Microelectron. J.,2006
4. Development of piezoelectric micromachined ultrasonic transducers;Akasheh;Sen. Act A,2004
5. Bimorph pMUT with dual electrodes;Akhbari;IEEE MEMS.,2015
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