1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and SystemSchool of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China
2. Integrated Circuits Laboratory, Institute of Microengineering, School of Engineering, École Polytechnique Fédérale de Lausanne, Neuchâtel, Switzerland
3. Department of Emergency, The First Affiliated Hospital of Xi’an Jiaotong University, Xi’an, China