Author:
Alper Said Emre,Azgin Kivanc,Akin Tayfun
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS;Kranz,1997
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