Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing

Author:

Prache Pierre,Juillard Jérôme,Ferreira Pietro Maris,Barniol Núria,Riverola Marti

Funder

Spanish Government

European Union FEDER program

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference42 articles.

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4. Dual-DLL-based CMOS all-digital temperature sensor for microprocessor thermal monitoring;Woo;2009 IEEE International Solid-State Circuits Conference − Digest of Technical Papers,2009

5. Smart temperature sensors in standard CMOS;Makinwa;Procedia Eng.,2010

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1. Resonant Inertial Mass Sensing for VOCs—CMOS-Compatible SoC Integration Advantages and Challenges: A Review;IEEE Sensors Journal;2023-01-01

2. State-of-the-Art in Mode-Localized MEMS Coupled Resonant Sensors: A Comprehensive Review;IEEE Sensors Journal;2021-04-01

3. Enhancement of Frequency Stability in Injection Locked Bulk Mode MEMS Oscillators;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

4. Micro-electrometer Based on Mode-Localization Effect;Micro and Nano Machined Electrometers;2020

5. Nonlinear Operation of Resonant Sensors Based On Weakly Coupled Resonators: Theory and Modeling;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2019-12

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