Micro-electrometer Based on Mode-Localization Effect
Author:
Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-13-3247-0_2
Reference50 articles.
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4. R.H. Olsson, K.E. Wojciechowski, M.S. Baker, M.R. Tuck, J.G. Fleming, Post-CMOS-compatible aluminum nitride resonant MEMS accelerometers. J. Microelectromech. Syst. 18(3), 671–678 (2009)
5. C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio, B. Simoni, A resonant microaccelerometer with high sensitivity operating in an oscillating circuit. J. Microelectromech. Syst. 19(5), 1140–1152 (2010)
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