Air-gap polysilicon thin film transistors on glass substrates

Author:

Mahfoz–Kotb H,Salaün A.C,Mohammed-Brahim T,Coulon N,Bonnaud O

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. A RESONANT‐GATE SILICON SURFACE TRANSISTOR WITH HIGH‐QBAND‐PASS PROPERTIES

2. Air-gap amorphous silicon thin film transistors

3. P. Mei, J. Ho, Y. Wang, R. Lau, R. Street, J.B. Boyce, J.P. Lu, Thin film transistor technologies V, in: Proceedings of the Electrochemical Society 198th Meeting, Phoenix, AZ, 2000, p. 22.

4. Polycrystalline silicon thin films for MEMS applications

5. H. Mahfoz-Kotb, JNRDM’02, Grenoble, France, 2002.

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